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  • Kofloc Standard Mass Flow Meter 3760 Series

    Standard Mass Flow Meter



    MODEL 3760 SERIES





    The Model 3760 Series is a compact, low-cost mass flow meter developed based on the Model 3660 Series. It has been developed as a standard model of various analyzers and vacuum equipment for research and development at universities and research institutes.



    Features :

    • Improved constant-current temperature difference detection type flow sensor for quick response
    • The compact body permits installation at any location.

    Standard Spesifications:

    1. Flow range (N2 equivalent, 20/1atm)

        3760 : 10 SCCM20 SLM (freely selectable)

        3765 : 30 SLM100 SLM (freely selectable)

    2. Sensor  : Thermal mass flow sensor

    3. Response

        3760 : 2 sec. or less

        3765 : 3 sec. or less

    4. Accuracy 

       3760 : ±1.0%F.S. (25℃)

       3765 : ±1.5%F.S. (25℃)

    5. Temperature coefficient

        3760 : ±0.1 F.S./℃ (15–35℃)

        3765 :  ±0.2 F.S./℃ (15–35℃)

    6. Repeatability :  ±0.5%F.S. (20℃)

    7. Proof pressure : 980kPa (G)

    8. Leak rate : 1 × 10-8 Pa•m3/s or less (excluding permeation of He)

    9. Allowable ambient temperature  : 5–45℃

    10. Allowable ambient humidity : 10–90% (No condensation allowed)

    11. Materials of parts in  contact with gases :  Body: SUS316

                                                                                  Sealing: FKM (option: CR or NBR)

    12. Electric connection : Dsub 9-pin connector as per KFC  Standard (Compliant with SEMI Standard)

    13. Flow rate output signals : 0–5 VDC (External load resistance: 250 kΩ or more)

    14. Required power supply : +15VDC (±5%) 100mA, −15VDC (±5%)100mA

    15. Joint (Main unit bore)  

          3760 : Standard: 1/4SWL

                     Option: 1/8SWL 1/4VCR RC1/4, etc.

          3765 : Standard: 3/8SWL

                    Option: 1/2SWL 3/8VCR RC3/8, etc.

    16. Weight

          3760 : Approx. 800 g

          3765 : Approx. 1000 g

    !!Note!! 
    Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.
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