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  • Kofloc Standard Mass Flow Controller MODEL 3660 SERIES

    Standard Mass Flow Controller

    MODEL 3660 SERIES

    Model 3660 Series Mass Flow Controller has been developed centerign the focus on compactness and low cost and is being acclaimed by a wide range of users for diverse appllications, including from laboratory research  and devolopment activities to the use as standartd  mass flow control model  for various types odf analyzers and vacuum devices in the production line.  Varieties  of derived models and options are avaible.

    Features
    ·     -    Equipped with an advancesd flow sensor of constant-current temperature difference detection type tu ensure high-speed response
    ·     -  Use of a normally closed valve to ensure safety
    ·     -    High reliabillity ensured using a selenoid actuar
    ·     -   Low differential pressure type control avaible for combustible gases (LP option)

      
    Standard spesifications
                 1. Model : Flow range (N2 equivalent,20/1 atm)
        3660 : 10 SCCM–20 SLM (freely selectable)
        3665 : 30 SLM-100 SLM (freely selectable)

    2.  Model : Sensor
        3660 : Thermal mass flow sensor

    3. Model : Valve type
        3660 : Proportional solenoid valve (closed when not energized)

    4.  Model : Control range
        3660 : 2–100% (F.S.)
        3665 : 5–100% (F.S.)

    5. Model : Response
        3660 : 2 sec. or less (0–100% within ±2% typical)
        3665 : 3 sec. or less (0–100% within ±2% typical)

    6. Model : Accuracy
        3660 : ±1.0% F.S. (25)
        3665 : ±1.5% F.S. (25)

    7. Model : Temperature coefficient
        3660 : ±0.1 F.S./ (15–35)
        3665 : ±0.2 F.S./ (15–35)

    8. Model : Repeatability
        3660 : ±0.5%F.S.

    9.  Model : Operating differential pressure
         3660 : F.S. ≤ 5 SLM: 50–300 kPa (G)
                    F.S. > 100 SLM: 50–300 kPa (G)
         3665 : F.S. ≤ 50 SLM: 150–300 kPa (G)
                    F.S. > 50 SLM: 200–300 kPa (G)
         Option : Medium differential pressure (MP) and low differential pressure (LP) specifications are available.

    10. Model : Allowable operating pressure
          3660 : 500 kPa (G) or less

    11. Model : Proof pressure
          3660 : 980 kPa (G)

    12.  Model : Leak rate
          3660 : 1 × 10-8 Pa.m3/s or less (excluding permeation of He)

    13. Model : Allowable ambient temperature
          3660 : 5–45°C

    14. Model : Allowable ambient humidity
          3660 : 10–90% (No condensation allowed)

    15. Model : Materials of parts in contact with gases
          3660 : - Body: SUS316
                     - Valve seat: FKM (option: CR or NBR)
                     - Sealing: FKM (option: CR or NBR)

    16. Model : Electric connection
          3660 : Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)

    17. Model : Flow rate input signals
          3660 : 0–5 VDC (Input impedance: 1 MΩ or more)

    18. Model : Flow rate output signals
          3660 : 0–5 VDC (External load resistance: 250 kΩ or more)

    19. Model : Required power supply
          3660 : +15 VDC (±5%) 100 mA, −15 VDC (±5%) 250 mA

    20. Model : Joint (Main unit bore)
          3660 : - Standard: 1/4SWL
                     - Option: 1/8SWL 1/4VCR RC1/4, etc.
          3665 : - Standard: 3/8SWL
                     - Option: 1/2SWL 3/8VCR RC3/8, etc.

    21.  Model : Weight
          3660 : Approx. 1000 g
          3665 : Approx. 1500 g

    !!Note!!
    Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us. 


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