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  • Kofloc Pressure Regulator Valve (Precision Regulator for Low Pressure Regulation) MODEL 6610

    Pressure Regulator  Valve (Precision Regulator  for Low Pressure Regulation)
    MODEL 6610


    This valve has been developed for better repeatability and quick, reliable pressure regulation by increasing the accuracy of the low-pressure side compared with the Model 6600. It is ideal for high-sensitivity analyzers and semiconductor manufacturing equipment, as well as for research and development.


    1.Features
    -High-precision regulation on the low-pressure side
    High regulation performance with repeatability of ±1% or less when
    the pressure on the primary side and load resistance on the second-
    ary side change under the set pressure condition of 0.01–0.15 MPa.
    - Non-grease specification
    The sections in contact with gas are made of stainless steel, Viton,
    and Teflon without using grease. This valve is ideal for the semicon-
    ductor industry which requires ultra-clean conditions.
    - Lock nut
    The regulating position, once it has been set, can be fixed by a lock
    nut to prevent the setting from changing.
    - Non-bleed type
    This non-bleed type valve prevents gas from leaking to the outside

    2.Application
    -Gas chromatography
    - High-purity gas control
    - Low-pressure controllers
    - Semiconductor industry

    3.Standard Specifications
    Fluids
    Various gases
    Maximum primary pressure
    0.4MPa
    Secondary control pressure
    0.01-0.15MPa
    Maximum flow
    5L/MIN
    Minimum operating differential
    0.1 MPa or more
    Materials of parts in contact with gases
    SUS316, FKM, fluorocarbon resin, SUS304,
    SUS303
    Proof pressure
    0.8MPa
    Repeatability
    Within ±1% of the pressure rating
    Heat resistance
    5°C-60°C
    Connection end
    Rc1/8
    Materials of parts in contact with fluids

    SUS316, FKM, fluorocarbon resin, SUS304,
    SUS303
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