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  • Kofloc Low-Cost Metal Sealed Mass Flow Meter Model 5400

    Kofloc Low-Cost Metal Sealed Mass Flow Controller /Meter

    Model  5400

     

    The Model 5400 Series is a successor to the Model 3440, with enhanced basic capabilities. The appearance is similar to the conventional MFC. The sensor drive system is improved : the zero-drift is further  reduced and the response in the lower range is improved . The Model 5410 Series is a mass flow meter with the same body design as that of the 5400 series.

    Features :
    • Control and response in each setting range are improved.
    • The following capability to the set voltage is improved (supporting ramping specifications).
    • As the valve is improved, the control resolution in each range is improved

    Standard Spesifications :

    1. Flow range (N2 equivalent,20/1 atm) 

         5400  : 10 SCCM–20 SLM (freely selectable)
         5410 :  10 SCCM–20SLM(freely selectable)

    2. Sensor

        5400  : Thermal mass flow sensor

    3. Valve type 

        5400  : Proportional solenoid valve (closed when not energized)   
        5410 :  -

    4. Control range 

        5400  : 2–100% (F.S.)                                   
        5410 :  -

    5. Response 

        5400  : 1 sec. or less (0–100% within ±2% typical)                
        5410 :  -

    6. Accuracy 

        5400  : ±1% F.S. (20)

    7. Repeatability : Within ±0.2% F.S. (20)

    8. Operating differential  pressure 

        5400  : F.S. ≤ 5 SLM: 50–300 kPa                                          
                    F.S.> 5 SLM: 100–300 kPa           
        5410 :  -                       
                    -           

    9. Allowable operating pressure

        5400  : 300 kPa (G) or less

    10. Proof pressure : 980 kPa (G)

    11. Leak rate : 1 × 10-11 Pa•m3/s or less

    12. Allowable ambient temperature  :  0–50 (Accuracy guaranteed at 15–35,   ±0.1% F.S./)

    13. Allowable ambient humidity :   10–90% (No condensation allowed)

    14. Materials of parts in  contact with gases :  

          - Body: SUS316L

          - Diaphragm: Ni-Co

          - Valve seat: PTFE

         - Sealing: SUS316L, Ni

    15. Electric connection : Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)

    16. Flow rate input signals   :

          5400  :  0–5 VDC (Input impedance: 1 MΩ or more)  

          5410 :  -

    17. Flow rate output signals :  0–5 VDC (Minimum load resistance: 250 kΩ or more)    

    18. Required power supply :

          5400  :  +15 VDC (±5%) 100 mA,                    
                       −15VDC (±5%) 200mA       
                                
         5410 :  +15 VDC (±5%) 100 mA,
                     −15VDC (±5%) 100mA

    19. Joint (Main unit bore) : Standard: 1/4 VCR equivalent Option: 1/4 SWL

    20. Weight 

          5400  :   Approx. 1000 g  
                                     
          5410 :  Approx. 800 g
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