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  • Kofloc High Grade Mass Flow Meter 3100 Series

    High-grade Mass Flow Meter
    MODEL 3100 SERIES



    The Model 3100 Series Mass Flow Meter is a new, ad-vanced high-precision flowmeter developed based on the Model 3200 Series. The incorporated innovative capillary type flow sensor reduces pressure loss and ensures high response as well as ensuring stability.

    Features :
    • Equipped with a temperature follow-up type current difference detection flow sensor to ensure high accuracy and quick response.
    • Measurements of minute flows available up to 1 SCCM full scale (SR option).

    Standard Spesifications:

    1. Flow range (at N2 calibration conditions) : 10SCCM-20SLM

    2. Response : 1 sec. or less to within ±2% of full scale of  final value typical for 0-100% response

    3. Accuracy : Within ±1.0% F.S./3100

    4. Linearity : Within ±0.5% F.S.

    5. Repeatability : Within ±0.2% F.S.

    6. Proof pressure : 980kPa

    7. Leak rate : 1x10-8 Pa•m3/s or less (excluding transmission of He)

    8. Working temperature range : 0-50℃ (Accuracy guarantee: 15-35℃)

    9. Materials of parts exposed to gases :

        - Body : SUS 316L, SUS 316, PTFE

        - Seals : Viton® (Optional: Neoprene®)

    10. Joint :

         - Standard : 1/4SWL®

         - Optional: 1/8SWL® 1/4VCR® RC1/4®, etc.

    11. Electrical connections : Dsub 9-pin male connector per KFC standard (SEMI standard)

    12. Flow rate output signals : 0-5VDC

    13. Required power supply* : +15VDC (±5%) 100mA, –15VDC (±5%) 100mA
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